Multi-Gas Sensing Design based on Nonlinear Coupled Micromachined Resonators
Zhengliang Fang  1, @  , Amal Hajjaj  1, *, @  , Stephanos Theodossiades  1, *, @  
1 : Wolfson School of Mechanical, Electrical and Manufacturing Engineering
Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough, LE11 3TU, UK -  United Kingdom
* : Corresponding author
Subject : : Oral
Topics : MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords : Gas sensor ; Multi sensing ; MEMS ; Mode ; localization
PDF version :  PDF version
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