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sciencesconf.org:enoc2020:290883
Parametric resonance of a shallow arch microbeam for sensing applications
Hassen Ouakad
1, *,
@
,
Fehmi Najar
2,
@
1 :
SULTAN QABOOS UNIVERSIY (SQU) -
Website
Al Khoudh, MUSCAT, OMA - Oman
2 :
TUNISIA POLYTECHNIC SCHOOL (EPT) -
Website
LA MARSA, TUNIS - Tunisia
* :
Corresponding author
Subject :
:
Oral
Topics
:
MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords
:
MEMS
;
arch
;
resonator
;
clamped
;
guided
;
bi
;
directional
;
electrostatic
PDF version
:
PDF version
Online user:
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