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Modeling non-conventional vibrational modes of micro-plates in viscous fluids
1 : Institute of Sensor and Actuator Systems - Vienna University of Technology
(ISAS - TUWIEN)
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Website
Gusshausstrasse 27, 1040 Vienna, Austria -
Austria
| Subject : | : | Oral |
| Topics | : | MS-12 Micro- and Nano-Electro-Mechanical Systems |
| Keywords | : | Fluids ; Microsystems ; Plates ; MEMS ; Dynamics ; AFM |
| PDF version | : |  PDF version |
