Modeling non-conventional vibrational modes of micro-plates in viscous fluids
Andre Loch Gesing  1, @  , Daniel Platz  1, @  , Ulrich Schmid  1, @  
1 : Institute of Sensor and Actuator Systems - Vienna University of Technology  (ISAS - TUWIEN)  -  Website
Gusshausstrasse 27, 1040 Vienna, Austria -  Austria
Subject : : Oral
Topics : MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords : Fluids ; Microsystems ; Plates ; MEMS ; Dynamics ; AFM
PDF version :  PDF version
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