Modeling Nonlinearities in MEMS Micro Mirrors: From Single Chip to Wafer Level
Ulrike Nabholz  1, *, @  , Jan Mehner  2, @  , Peter Degenfeld-Schonburg  1, *, @  
1 : Robert Bosch GmbH, Corporate Research
71272 Renningen -  Germany
2 : Chemnitz University of Technology
09107 Chemnitz -  Germany
* : Corresponding author
Subject : : Oral
Topics : MS-14 Nonlinear Dynamics for Engineering Design
Keywords : nonlinear dynamics ; MEMS ; modeling ; mode coupling
PDF version :  PDF version
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