Resonance frequency measurement of stress-engineered nanomechanical resonator and its lower limit of frequency uncertainty
Mingkang Wang  1, 2, *, @  , Rui Zhang  3, @  , Robert Ilic  1, @  , Yuxiang Liu  3, @  , Aksyuk Vladimir  1, *, @  
1 : National Institute of Standards and Technology [Gaithersburg]  (NIST)  -  Website
100 Bureau Drive, Stop 1070, Gaithersburg, MD 20899-1070 -  United States
2 : Department of Physics [Maryland]  (UMD)  -  Website
University of Maryland College Park, MD 20742-4111 -  United States
3 : Worcester Polytechnic Institute
100 Institute Rd, Worcester, MA 01609 -  United States
* : Corresponding author
Subject : : Oral
Topics : MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords : Frequency detection limit ; Cramer Rao lower bound ; Optomechanical readout ; Stress engineered resonator
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