Frequency Stabilization of MEMS Oscillators Using Internal Resonance
Oriel Shoshani  1, @  , Scott Strachan  2, @  , Daniel Lopez  3, @  , David Czaplewski  4, @  , Steven Shaw  5, @  
1 : Ben Gurion University  (BGU)
Beer Sheva -  Israel
2 : SiTime
Santa Clara, CA -  United States
3 : Pennsylvania State University  (PSU)
University Park, PA -  United States
4 : Argonne National Laboratory
Lemont, IL -  United States
5 : Florida Institute of Technology  (FloridaTech)
Melbourne, FL -  United States
Subject : : Oral
Topics : MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords : Frequency Stabilization ; Internal Resonance ; MEMS
PDF version :  PDF version
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