Engineering the Dynamic Range of Si3N4 Nonlinear String Resonators
1 : Precision and microsystems engineering (Delft, The Netherlands)
Mekelweg 2, 2628 CD, Delft -
Netherlands
2 : Kavli Institute of Nanosciences [Delft]
* : Corresponding author
Lorentzweg 1, 2628 CE Delft, The Netherlands -
Netherlands