Engineering the Dynamic Range of Si3N4 Nonlinear String Resonators
Zichao Li  1, *, @  , Minxing Xu  1, 2, @  , Richard Norte  1, 2, @  , Alejandro Aragón  1, @  , Fred Van Keulen  1, @  , Peter Steeneken  1, 2, @  , Farbod Alijani  1, *, @  
1 : Precision and microsystems engineering (Delft, The Netherlands)
Mekelweg 2, 2628 CD, Delft -  Netherlands
2 : Kavli Institute of Nanosciences [Delft]
Lorentzweg 1, 2628 CE Delft, The Netherlands -  Netherlands
* : Corresponding author
Subject : : Oral
Topics : MS-12 Micro- and Nano-Electro-Mechanical Systems
Keywords : Duffing nonlinearity ; high ; stress Si3N4 ; nano strings ; geometric design ; dynamic range
PDF version :  PDF version
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